The Study of Ta-Zr-Cu Ternary Thin Film Metallic Glass Fabricated applied to diffusion barrier
碩士 === 國立臺北科技大學 === 材料科學與工程研究所 === 105 === Ta-Zr-Cu thin film metallic glasses (TFMGs) are fabricated by placing the copper (Cu) and zirconium (Zr) metal slices on the tantalum (Ta) target to single target magnetron co-sputter. The thin films’ composition can be changed by altering the amounts of me...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/nf985e |