| Summary: | 碩士 === 國立臺北科技大學 === 製造科技研究所 === 105 === In this study, microwave plasma jet chemical vapor deposition (MPJCVD) system deposited diamond-like carbon (DLC) film on the inner surface of alumina tube. The MPJCVD system was used to study the growth of DLC with a total gas pressure of 70 torr and a methane concentration of 0.25%. The microstructures and qualities of DLC deposited in alumina tubes were investigated using scanning electron microscopy (SEM), X-ray diffractometry (XRD) and Raman spectroscopy. The results indicate that with different plasma distribution for Diamond film grain morphology is mainly (100) oriented crystal structure, facet、rectangular flaky configuration、(111) directional diamond carbon film on the alumina tube substrates. The results of the sandblasting test show that the wear rate of alumina under different sand materials, alumina # 60 is greater than silicon carbide # 80, silicon carbide # 80 is greater than alumina # 80, the greater the amount of sand particles should be higher, the greater the hardness of sand the higher the amount of wear.
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