Diamond-like Carbon Films Deposited in Alumina Tubes
碩士 === 國立臺北科技大學 === 製造科技研究所 === 105 === In this study, microwave plasma jet chemical vapor deposition (MPJCVD) system deposited diamond-like carbon (DLC) film on the inner surface of alumina tube. The MPJCVD system was used to study the growth of DLC with a total gas pressure of 70 torr and a methan...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/qehexw |