Tests of Fabrication Modules of Self-powered Micro-blood Pressure Sensor Chip Using Interdigitated Back Contact Mono-crystalline Silicon Solar Cells as Energy Harvesting Power Sources

• Main Authors: HUANG, GUAN-JHOUG, 黃冠中
• Other Authors: LIU, CHIEN-WEI
• Format: Others
• Language: zh-TW
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/d6zayv

碩士 === 國立雲林科技大學 === 機械工程系 === 105 === In the recent year, the self-powered sensing devices have attracted more and more attention due to their low power consumption requirement which could harvest energy from the environment energy sources directly and drive the devices without using external electrical power. In addition, the photovoltaic (PV) energy harvesting devices for ICs based chips, sensors, or panel systems to form self-powered systems can provide a higher output electrical power than other energy harvesting techniques such as fuel cell or thermoelectric generator (TEG) etc.. Therefore, the thesis is mainly to do all of the tests of fabrication modules of self-powered micro-blood pressure sensor chip (SPMBPSC) by using interdigitated back contact (IBC) mono-crystalline silicon solar cells as energy harvesting power sources and to overcome the problems met in the fabrication integration process of developed self-powered chip. In this study, the developed SPMBPSC process which includes with the two fabrication modules of (1) the micro-blood pressure sensor chip (MBPSC) and (2) the IBC solar cell (IBCSC) have been tested completely. In the present work, first, after a static performance calibration of fabricated MBPSC at a temperature range from 30 to 60 oC under the applied voltages of 0.5, 1.0 and 2.0 V, the root mean square (Rsqr) of best fit straight line (BFSL) and hysteresis of MBPSC are 0.9997-1.0 and 0.41-1.5 %VFS, respectively. In the calibration case of MBPSC at 30 oC, the full scale span voltage (VFS), zero offset voltage (V0), sensitivity, Rsqr of BFSL and hysteresis of SPMBPS are 0.941 mV, 26.43 mV, 0.003159 mV/mmHg, 99.999 %VFS and 0.43 %VFS under an applied voltage of 0.5 V, respectively. Second, in the IBCSC case designed with a contact opening ratio of 5 %, a width of n+ emitter of 100 µm and a width ratio of p+ emitter/n+ emitter of 6 can obtain a best PV performance and the open circuit voltage (Voc), short circuit current density (Jsc), fill factor (FF) and cell efficiency (η) of this best IBCSC are 0.6 V, 34.77 mA/cm2, 78.82 % and 16.44 %. In addition, according to this best IBCSC PV performance, the IBCSCs designed with the cell areas of 0.5cmx0.5cm (0.25cm2) and 1cmx1cm (1cm2) can obtain the maximum output powers (Pmax) of 4.11 and 16.44mW, respectively, that can great satisfy the required Pmax of 0.8 mW of MBPSC under an applied voltage of 2.0 V.