Analysis of AZO Films Prepared Under Different Ion Beam Sputtering Conditions by Double Lorentz Oscillator Model
碩士 === 輔仁大學 === 物理學系碩士班 === 106 === Aluminum-doped zinc ( AZO ) thin films were deposited at room temperature with various aluminum concentrations and oxygen partial pressures on the glass substrates and silicon wafers by ion beam co-sputtering process. The optical properties and electrical properti...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84kdt4 |