Study on Two Dimensional Metrology System with Automatic Identification and Calibration Function for Dispense PUMP Parts

• Main Authors: CHUNG,CHIH-SHENG, 鍾智盛
• Other Authors: HSU,QUANG-CHERNG
• Format: Others
• Language: zh-TW
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/737j39

碩士 === 國立高雄應用科技大學 === 機械工程系 === 106 === In this study, the two dimensional measurement system was developed for measuring the wear of inner diameter for the metal dispensing. The proposed system including 5 million pixel CCD camera, telecentric lens with magnification of 0.5 times and three axis driving systems. This system research studies the three major problems of XY axis system accuracy, feature point correction method and system measurement accuracy. The template matching function was used to position the device under test (DUT). In the image processing and measurement sections, the optimal binary value, the contour of feature and the center ware obtained by Otus method, Canny edge detection method and Hough Transfer function. The results show that, the positioning accuracy of the XY platform of the proposed system in x and y axis are 10um and 10um, respectively. And the resolution of the CCD image is 6.896um/pixel in the X-axis, The axial direction is 6.889um/pixel. The repeating accuracy of the measuring system is 11um, and the error compare with the tool microscope. The maximum and the minimum deviation are 32um and -34um, respectively. The repeating accuracy of the inner hole diameter of the DUT is 15um, and the error of the comparison with the tool microscope. The maximum and the minimum deviation are 81um and -91um, respectively. The repeating accuracy of the outer hole diameter of the DUT is 19um, and the error of the comparison with the tool microscope. The maximum and the minimum deviation are 110um and -19um, respectively.