A Highly Sensitive CMOS-MEMS Thermal Resistive Altimeter with Dual Sensors
碩士 === 國立高雄應用科技大學 === 光電與通訊工程研究所 === 106 === In this study, a highly sensitive thermal resistive altimeter based on CIC TSMC 0.35 μm 2P4M CMOS-MEMS process was designed and fabricated by adopting dual sensing resistive elements. The thermal resistive altimeter with a nano-gap was completed by using...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/ch78q6 |