Silane-compounds-assisted surface metallizationtechnology of silicon
碩士 === 國立中興大學 === 化學工程學系所 === 106 === Along with the advance of the high technology, the requirement of wire of IC industry tend to be thin, tiny and lightweight design. The traditional wire process incapable fit the trend of IC industry which demand to handle the high wire density and designed sca...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2018
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Online Access: | http://ndltd.ncl.edu.tw/handle/7bbewp |