Design and Characterizations of Lithium Niobate Based Dual Parallel Microrings Resonator
碩士 === 國立成功大學 === 微電子工程研究所 === 106 === This thesis focuses on investigating the design and fabrication of microring resonators (MRR). Because of their unique sensitivity in wavelength, they have found a wide applicability in integrated optoelectronics. Specifically, parallel dual microring resonator...
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| Format: | Others |
| Language: | zh-TW |
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2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/wma5b2 |
| Summary: | 碩士 === 國立成功大學 === 微電子工程研究所 === 106 === This thesis focuses on investigating the design and fabrication of microring resonators (MRR). Because of their unique sensitivity in wavelength, they have found a wide applicability in integrated optoelectronics. Specifically, parallel dual microring resonators with radii of hundreds of microns are fabricated in lithium niobate (LiNbO3) substrate using stearic acid as a proton exchange source. These resonators are first analyzed by observing their mode profiles using a beam profiler and transmission power amplitudes are evaluated using the infrared photodetectors coupled with an optical multimeter. Then, the aforementioned devices are then spectrally characterized by focusing C+L-band ASE light source into the bus waveguide via a tapered lensed fiber and under a selective resonance condition, the corresponding transmission spectrum can be duly extracted from the through port. Finally, a subsequent failure analysis is also performed in order to speculate why the performance of dual MRRs deviated from the initial expectation.
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