Study of Pb(Zr0.52Ti0.48)O3 Piezoelectric Thick Films via a Modified Sol-Gel Method for MEMS Piezoelectric Accelerometer Applications

碩士 === 國立成功大學 === 電機工程學系 === 106

Bibliographic Details
Main Authors:	Yu-ChunChien, 簡育群
Other Authors:	Sheng-Yuan Chu
Format:	Others
Language:	zh-TW
Published:	2018
Online Access:	http://ndltd.ncl.edu.tw/handle/n4et6g

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spelling	ndltd-TW-106NCKU54421242019-05-16T01:08:00Z http://ndltd.ncl.edu.tw/handle/n4et6g Study of Pb(Zr0.52Ti0.48)O3 Piezoelectric Thick Films via a Modified Sol-Gel Method for MEMS Piezoelectric Accelerometer Applications 以改良式溶膠凝膠法製備Pb(Zr0.52Ti0.48)O3壓電厚膜應用於MEMS壓電加速規之研究 Yu-ChunChien 簡育群碩士國立成功大學電機工程學系 106 Sheng-Yuan Chu 朱聖緣 2018 學位論文 ; thesis 98 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立成功大學 === 電機工程學系 === 106
author2	Sheng-Yuan Chu
author_facet	Sheng-Yuan Chu Yu-ChunChien 簡育群
author	Yu-ChunChien 簡育群
spellingShingle	Yu-ChunChien 簡育群 Study of Pb(Zr0.52Ti0.48)O3 Piezoelectric Thick Films via a Modified Sol-Gel Method for MEMS Piezoelectric Accelerometer Applications
author_sort	Yu-ChunChien
title	Study of Pb(Zr0.52Ti0.48)O3 Piezoelectric Thick Films via a Modified Sol-Gel Method for MEMS Piezoelectric Accelerometer Applications
title_short	Study of Pb(Zr0.52Ti0.48)O3 Piezoelectric Thick Films via a Modified Sol-Gel Method for MEMS Piezoelectric Accelerometer Applications
title_full	Study of Pb(Zr0.52Ti0.48)O3 Piezoelectric Thick Films via a Modified Sol-Gel Method for MEMS Piezoelectric Accelerometer Applications
title_fullStr	Study of Pb(Zr0.52Ti0.48)O3 Piezoelectric Thick Films via a Modified Sol-Gel Method for MEMS Piezoelectric Accelerometer Applications
title_full_unstemmed	Study of Pb(Zr0.52Ti0.48)O3 Piezoelectric Thick Films via a Modified Sol-Gel Method for MEMS Piezoelectric Accelerometer Applications
title_sort	study of pb(zr0.52ti0.48)o3 piezoelectric thick films via a modified sol-gel method for mems piezoelectric accelerometer applications
publishDate	2018
url	http://ndltd.ncl.edu.tw/handle/n4et6g
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Study of Pb(Zr0.52Ti0.48)O3 Piezoelectric Thick Films via a Modified Sol-Gel Method for MEMS Piezoelectric Accelerometer Applications

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