Identification of the Classifier for the Pattern of Spatial Randomness
碩士 === 國立中央大學 === 電機工程學系 === 106 === In this paper, we find the relationship between diesize and Boomerang Chart base on wafer map which random distribution of defects. And building model by the relationship that let user just provided diesize to get bound of wafer cause by random defects. To achiev...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/f2kpd6 |