The Growth and Exploration of Bi2Te3 Thermoelectric Thin Films using RF Magnetron Sputtering Method

The Growth and Exploration of Bi2Te3 Thermoelectric Thin Films using RF Magnetron Sputtering Method

碩士 === 國立高雄海洋科技大學 === 微電子工程研究所 === 106

Bibliographic Details
Main Authors: WANG, JUN-ZHI, 王俊智
Other Authors: YANG, CHIN-CHIN
Format: Others
Language:zh-TW
Published: 2018
Online Access:http://ndltd.ncl.edu.tw/handle/ch652x
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spelling ndltd-TW-106NKIM04280052019-05-16T01:24:51Z http://ndltd.ncl.edu.tw/handle/ch652x The Growth and Exploration of Bi2Te3 Thermoelectric Thin Films using RF Magnetron Sputtering Method 利用射頻磁控濺鍍法備製Bi2Te3熱電薄膜與其特性之探討 WANG, JUN-ZHI 王俊智 碩士 國立高雄海洋科技大學 微電子工程研究所 106 YANG, CHIN-CHIN WU, CHIA-CHING 楊誌欽 吳家慶 2018 學位論文 ; thesis 90 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立高雄海洋科技大學 === 微電子工程研究所 === 106
author2 YANG, CHIN-CHIN
author_facet YANG, CHIN-CHIN
WANG, JUN-ZHI
王俊智
author WANG, JUN-ZHI
王俊智
spellingShingle WANG, JUN-ZHI
王俊智
The Growth and Exploration of Bi2Te3 Thermoelectric Thin Films using RF Magnetron Sputtering Method
author_sort WANG, JUN-ZHI
title The Growth and Exploration of Bi2Te3 Thermoelectric Thin Films using RF Magnetron Sputtering Method
title_short The Growth and Exploration of Bi2Te3 Thermoelectric Thin Films using RF Magnetron Sputtering Method
title_full The Growth and Exploration of Bi2Te3 Thermoelectric Thin Films using RF Magnetron Sputtering Method
title_fullStr The Growth and Exploration of Bi2Te3 Thermoelectric Thin Films using RF Magnetron Sputtering Method
title_full_unstemmed The Growth and Exploration of Bi2Te3 Thermoelectric Thin Films using RF Magnetron Sputtering Method
title_sort growth and exploration of bi2te3 thermoelectric thin films using rf magnetron sputtering method
publishDate 2018
url http://ndltd.ncl.edu.tw/handle/ch652x
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