Fabrication of high frequency SAW filter on LiNbO3 substrate using the nano-imprinting lithography technology
碩士 === 國立中山大學 === 電機工程學系研究所 === 106 === In this study, nano-imprinting lithography (NIL) technology is applied to fabricate the high frequency surface acoustic wave (SAW) filter. Compare with UV lithography and e-beam lithography, NIL has some advantages, including low cost, fast fabrication and so...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/suwg5t |