Phase Engineered 1T/2H WSe2/WOx 3D Nanostructures as Highly Sensitive NO Gas Sensors by Plasma-Assisted Selenization Process
碩士 === 國立清華大學 === 材料科學工程學系 === 106 === In this work, we have successfully combined the glancing angle deposition (GLAD) approach with plasma-assisted chemical vapor reduction (PACVR) method to fabricate the nano-structured tungsten diselenide (WSe2) as the reactive layer for gas sensor application....
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| Format: | Others |
| Language: | en_US |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/6hbvgu |