Improved Electrical Characteristics of FinFETs by Multilayer Dielectric Gate Stacks

碩士 === 國立清華大學 === 工程與系統科學系 === 106 === abstract hide

Bibliographic Details
Main Authors:	Huang, Chin-Hsiu, 黃晉修
Other Authors:	ChangLiao, Kuei-Shu
Format:	Others
Language:	zh-TW
Published:	2017
Online Access:	http://ndltd.ncl.edu.tw/handle/s895zk

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spelling	ndltd-TW-106NTHU55930012019-05-16T00:00:22Z http://ndltd.ncl.edu.tw/handle/s895zk Improved Electrical Characteristics of FinFETs by Multilayer Dielectric Gate Stacks 以多層介電質閘堆疊改善鰭式電晶體之電特性研究 Huang, Chin-Hsiu 黃晉修碩士國立清華大學工程與系統科學系 106 abstract hide ChangLiao, Kuei-Shu 張廖貴術 2017 學位論文 ; thesis 67 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 工程與系統科學系 === 106 === abstract hide
author2	ChangLiao, Kuei-Shu
author_facet	ChangLiao, Kuei-Shu Huang, Chin-Hsiu 黃晉修
author	Huang, Chin-Hsiu 黃晉修
spellingShingle	Huang, Chin-Hsiu 黃晉修 Improved Electrical Characteristics of FinFETs by Multilayer Dielectric Gate Stacks
author_sort	Huang, Chin-Hsiu
title	Improved Electrical Characteristics of FinFETs by Multilayer Dielectric Gate Stacks
title_short	Improved Electrical Characteristics of FinFETs by Multilayer Dielectric Gate Stacks
title_full	Improved Electrical Characteristics of FinFETs by Multilayer Dielectric Gate Stacks
title_fullStr	Improved Electrical Characteristics of FinFETs by Multilayer Dielectric Gate Stacks
title_full_unstemmed	Improved Electrical Characteristics of FinFETs by Multilayer Dielectric Gate Stacks
title_sort	improved electrical characteristics of finfets by multilayer dielectric gate stacks
publishDate	2017
url	http://ndltd.ncl.edu.tw/handle/s895zk
work_keys_str_mv	AT huangchinhsiu improvedelectricalcharacteristicsoffinfetsbymultilayerdielectricgatestacks AT huángjìnxiū improvedelectricalcharacteristicsoffinfetsbymultilayerdielectricgatestacks AT huangchinhsiu yǐduōcéngjièdiànzhìzháduīdiégǎishànqíshìdiànjīngtǐzhīdiàntèxìngyánjiū AT huángjìnxiū yǐduōcéngjièdiànzhìzháduīdiégǎishànqíshìdiànjīngtǐzhīdiàntèxìngyánjiū
_version_	1719158183795097600

Improved Electrical Characteristics of FinFETs by Multilayer Dielectric Gate Stacks

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