Improved Electrical Characteristics of FinFETs by Multilayer Dielectric Gate Stacks
碩士 === 國立清華大學 === 工程與系統科學系 === 106 === abstract hide
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2017
|
Online Access: | http://ndltd.ncl.edu.tw/handle/s895zk |
id |
ndltd-TW-106NTHU5593001 |
---|---|
record_format |
oai_dc |
spelling |
ndltd-TW-106NTHU55930012019-05-16T00:00:22Z http://ndltd.ncl.edu.tw/handle/s895zk Improved Electrical Characteristics of FinFETs by Multilayer Dielectric Gate Stacks 以多層介電質閘堆疊改善鰭式電晶體之電特性研究 Huang, Chin-Hsiu 黃晉修 碩士 國立清華大學 工程與系統科學系 106 abstract hide ChangLiao, Kuei-Shu 張廖貴術 2017 學位論文 ; thesis 67 zh-TW |
collection |
NDLTD |
language |
zh-TW |
format |
Others
|
sources |
NDLTD |
description |
碩士 === 國立清華大學 === 工程與系統科學系 === 106 === abstract hide
|
author2 |
ChangLiao, Kuei-Shu |
author_facet |
ChangLiao, Kuei-Shu Huang, Chin-Hsiu 黃晉修 |
author |
Huang, Chin-Hsiu 黃晉修 |
spellingShingle |
Huang, Chin-Hsiu 黃晉修 Improved Electrical Characteristics of FinFETs by Multilayer Dielectric Gate Stacks |
author_sort |
Huang, Chin-Hsiu |
title |
Improved Electrical Characteristics of FinFETs by Multilayer Dielectric Gate Stacks |
title_short |
Improved Electrical Characteristics of FinFETs by Multilayer Dielectric Gate Stacks |
title_full |
Improved Electrical Characteristics of FinFETs by Multilayer Dielectric Gate Stacks |
title_fullStr |
Improved Electrical Characteristics of FinFETs by Multilayer Dielectric Gate Stacks |
title_full_unstemmed |
Improved Electrical Characteristics of FinFETs by Multilayer Dielectric Gate Stacks |
title_sort |
improved electrical characteristics of finfets by multilayer dielectric gate stacks |
publishDate |
2017 |
url |
http://ndltd.ncl.edu.tw/handle/s895zk |
work_keys_str_mv |
AT huangchinhsiu improvedelectricalcharacteristicsoffinfetsbymultilayerdielectricgatestacks AT huángjìnxiū improvedelectricalcharacteristicsoffinfetsbymultilayerdielectricgatestacks AT huangchinhsiu yǐduōcéngjièdiànzhìzháduīdiégǎishànqíshìdiànjīngtǐzhīdiàntèxìngyánjiū AT huángjìnxiū yǐduōcéngjièdiànzhìzháduīdiégǎishànqíshìdiànjīngtǐzhīdiàntèxìngyánjiū |
_version_ |
1719158183795097600 |