The study of the meltback etching phenomenon for silicon nitride sealed nanotextured GaN-on-Si

The study of the meltback etching phenomenon for silicon nitride sealed nanotextured GaN-on-Si

碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 106

Bibliographic Details
Main Authors:	Kao, Zi-Wen, 高子雯
Other Authors:	Yeh, J. Andrew
Format:	Others
Language:	zh-TW
Published:	2018
Online Access:	http://ndltd.ncl.edu.tw/handle/y6cd7d

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