| Summary: | 碩士 === 國立臺灣大學 === 生醫電子與資訊學研究所 === 106 === Nanoplasmonic phenomena occur near nanostructure. Due to its non-contact, label-free nature, nanoplasmonic sensing has been applied to lots of biochemical sensing applications recently. In order to fabricate nanoplamonic substrate, many nanostructure fabrication methods have been developed. However, few are capable of achieving stable, large-area, and low-cost fabrication of the metal nanostructure. Moreover, due to the wide full width at half maximum (FWHM) of the spectrum, the figure of merit (FoM) of nanoplasmonic sensors are often low, causing its insensibility in detection. In our research, we propose a fabrication method combining laser interference lithography (LIL) and lift-off procedure to produce an isolated periodic gold nanostructure on glass substrate. LIL is also integrated with nanoimprint lithography (NIL) to fabricate a continuous periodic gold nanohole array. We first did FDTD simulation to determine the best parameters of the nanostructure. After fabricating the nanoplamonic sensor, we combined the nanostructure with a microfluidic chip to do bio-molecule detection. With this novel nanofabrication method, large-area (~ 5 mm × 5 mm) gold nanodisks array can be fabricated, and the sensitivity and FoM of the nanodisks can reach 190 nm/RIU and 2.69. On the other hand, the sensitivity and FoM of gold nanohole array is as high as 244 nm/RIU and 2.38. To prove the sensors can be applied to biosensing, these two nanoplasmonic sensors are used to detect immunoglobulin G (IgG) molecules. These results have shown their promising contribution in the application of point-of-care diagnosis.
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