| Summary: | 碩士 === 國立臺灣大學 === 物理學研究所 === 106 === In this thesis, a sandwich-type technique for the fabrication of high-TC Superconducting Quantum Interference Devices(SQUIDs) is researched. We deposited YBa2Cu3O7-δ/CeO2/YBa2Cu3O7-δ trilayer thin films on SrTiO3 substrate by RF-magnetron sputtering technique and made the SQUIDs by using photolithography and ion-beam etching process. We measured the characteristic curves of the SQUIDs on this structure, and expected this technique could be a possible method to substitute the bi-crystal substrate SQUIDs.
From the measured results, the roughness of the recycled substrates is 0.6 nm after polishing and annealing. The high-quality high-TC superconducting thin films were grown on the recycled substrates. We found that the SQUID characteristic has residual resistance at 77 K. However, after annealing at high oxygen pressure, it can recover its superconducting properties. Measured results show that critical current IC = 80 μA and peak-to-peak voltage Vpp = 0.79 μV with a bias current 100 μA at 77 K. The measured V-Φ curves show that, the larger the bias current, the larger amplitude of the voltage modulation, which agrees with the SQUID characteristic.
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