Manufacturing And Characterization of Highly-Densed Microlens Array by Mold Design And Multiple Casting Technique

• Main Authors: Ren-Hao Zhang, 張仁豪
• Other Authors: Pin-Chuan Chen
• Format: Others
• Language: zh-TW
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/t4dn67

碩士 === 國立臺灣科技大學 === 機械工程系 === 106 === 　　 The major goal of this research is to fabricate a high fill factor micro-lens array which the membrane thickness controlled by mold designing. In this study, we use micro-milling and duplicated molding technique to integrate multilayers and tunable micro-lens array into a microfluidic chip for further applications. 　　PDMS was poured and filled into the PMMA mold fabricated by micromilling to creat a high fill factor micro-lens chip. A complete tunable liquid-filled microlens chip was realized after the bonding of PDMS/Glass by lPDMS (uncured PDMS) method. Then, an UV glue curing was utilized to make an array of concave hemispherical micro lens which use as another mold-insert for the replication of spherical PDMS microlens array as the final result. 　　 Herein, we develop some techniques to solve problems related to: (1) The demolding of homogeneous material (PDMS) with the assistance of coating spray; (2) The leakage of PDMS caused by the spacing between PMMA mold-inserts by mold designing combined with lPDMS bonding to control the membrane thickness; (3) Utilizing lPDMS bonding instead of o×ygen plasma to increase the bonding strength. 　　Several e×periments were carried out to verify the quality of the high fill factor microlens arrays: (1) The measurement of PDMS membrane thickness to test if whether the leakage problem was solved; (2) The calculation of the fill factor of microlens array and compare with previous study; (3) The uniformity of microlens array through the same sag heights