Development of an Rapid-Screening and Automated Optical System used for Inspection of Spherical Microlens Array

• Main Authors: YEN-LIN LIU, 劉彥麟
• Other Authors: Pin-Chuan Chen
• Format: Others
• Language: zh-TW
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/55yrts

碩士 === 國立臺灣科技大學 === 機械工程系 === 106 === An automated optical inspection system through rapid screening is developed in this study, which is used to: (1) detect flaw on the microlens array; and (2) measure the diameter and focus length of the microlens array. This inspection system consists of a laser beam, beam expansion system, polarizers, spectroscope and CCD camera. In the detection of flaw on the microlens array, a CCD camera was used to capture the image of microlens array under the exposure of laser beam. Then the captured image was analyzed by an image-processing algorithm to highlight the defects, the method of distinguishing the defects of microlens array is to use pattern match, through the method of pattern match can screen out the flaw of microlens. In the estimation of microlens array uniformity and the focal length of microlens array, an image-processing algorithm associated with the motorized X-Y table were used. To validate the measurement from the home-built inspection system, a stereomicroscope was used. The comparison between the home-built system and the stereomicroscope show a good agreement and proved that this optical inspection system for microlens array is highly useful.