| Summary: | 碩士 === 國立虎尾科技大學 === 光電工程系光電與材料科技碩士班 === 107 === Self-powered technology is a system that can operate continuously without external power supply. It is used in combination with various sensors, data processing and transmission. In this study, nickel oxide film and zinc oxide film were sputtered by radio frequency magnetron sputtering system, and nickel oxide film was deposited on the second layer of nickel oxide film using mask to define the pattern. Al-doped zinc oxide nanorods structure was grown on zinc oxide film by hydrothermal method. Finally, NiO/AZO nanorods p-n piezoelectric nanogenerator was fabricated by combining the two methods, followed by field emission scanning. Scanning electron microscopy (FE-SEM) was used to analyze the morphology of nickel oxide film and Al-doped zinc oxide nanorods; X-ray dispersive spectrometer (EDS) was used to analyze whether Al-doped zinc oxide nanorods or not; X-ray diffraction (XRD) was used to analyze the crystallization characteristics of nickel oxide film and Al-doped zinc oxide nanorods; and photoluminescence spectrometer (PL) was used to analyze nickel oxide film, Al-doped zinc oxide nanorods and packaging. The optical properties of the latter.In this study, the measurement was carried out by a pneumatic hot press and a precision digital meter. The results showed that the optimum concentration of Al doping was 0.0001 mol. The average voltage, current and power were 21.6 mV, 0.346 μA and 7.47 nW respectively.
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