Synthesis, Characterization and Performance of the ZnO, ZnS, and ZnSe Nanostructures by Microwave Plasma Enhanced Chemical Vapor Deposition

• Main Authors: Sheng-Yuan Zeng, 曾聖淵
• Other Authors: Shih, Han-Chang
• Format: Others
• Language: zh-TW
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/8bx65c

碩士 === 中國文化大學 === 化學工程與材料工程學系奈米材料碩士班 === 106 === When in nano-scale, materials bear different characteristics, suck as optical, electrical, and magnetic properties. Zinc is an important element with low melting point and boiling point characteristic. In this work, zinc oxide nanocolumn、zinc sulfide nanowires、zinc selenide nanobars have been successfully synthesized by MPECVD(microwave plasma enhanced chemical vapor deposition). Use field emission scanning electron microscope(FESEM) to observe the surface morphology and use high resolution transmission electron microscopy(HRTEM) micrographs and selected area diffraction (SAD) to show the crystalline patterns of zinc compound nanostructures. ZnO growth direction is of [001], ZnS [002] and ZnSe [111].The structure and composition were characterized by means of X-ray diffraction (XRD), energy dispersive X-ray spectroscopy (EDS), X-ray photoelectron spectroscopy (XPS) and micro-Raman spectroscopy. The emission bands of the three zinc compounds were analyzed by photoluminescence (PL). ZnO UV emission is at 384nm, ZnS UV emission is at 338nm, and ZnSe blue emission is at 465nm.