Adhesion of Cu thin films deposited on flexible substrates
碩士 === 聖約翰科技大學 === 機械與電腦輔助工程系碩士班 === 106 === This work discusses the adhesion of copper thin films deposited on polyethylene terephthalate (PET) substrate by DC sputtering using different sputtering parameters. The effects of plasma treatment with 0, 5, and 10 minutes on the thin film properties are...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/xjwfu7 |