The study of ZnO and TiO2 thin film distributed Bragg reflection structure by RF magnetron sputter system
碩士 === 南臺科技大學 === 光電工程系 === 106 === In this paper, ZnO, TiO2 films were grown by RF magnetron sputtering. The results show that the luminescent properties of the films are observed by scanning electron microscope, transmission electron microscope and photoluminescence. First, a layer of ZnO thin fil...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2018
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Online Access: | http://ndltd.ncl.edu.tw/handle/q5ab9n |