Performance Baseline Establishment and Energy Saving Benefits Study on Different Humidification Methods for Make-up Air Handling Unit in Clean Room

• Main Authors: Chang-Jui Chiang, 江長叡
• Other Authors: 柯明村
• Format: Others
• Language: zh-TW
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/rfb569

碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系 === 106 === To strengthen the importance of energy management, International Standards Organization announced the ISO 50001:2011 Energy management systems on June 15, 2011. Based on the continuous improvement of P ( Planning ) - D ( Executive ) - C ( Examining ) - A ( Operation ), through the operation of this energy management system, it can help enterprises to improve the efficiency of energy use, and implementation results are regularly verified by the verification agency to confirm their procedures. 　　In this study, a semi-conductor packaging and testing plant in Taiwan collected operating data from the plants central monitoring system for five months (November to March).Data acquisition time is 1 data/hour. After the measurement parameter data is collected, the energy-consuming data is organized and then it is subjected to the regression analysis of the performance baseline equation to obtain the coefficients C0 to C5. The baseline equation for improving the performance of the electric steam humidifier before use in the make-up air handling unit is established. 　　This study uses the establishment of a baseline for make-up air handling unit in cleanroom to explore the energy saving benefits of different humidification methods. The results showed that if the continuous use of electro-thermal steam humidification in the next year when the make-up air handling unit is modified to washing humidification, the total power consumption is 56,403kWh.The washing humidification pump was switched on from November 1 to March 31 of the following year. The actual power consumption was 14,496kWh.This year saves 41,907kWh of electricity, saving about 74.3% of energy consumption. 　　The results of the study showed that the energy consumption of the make-up air handling unit using the washing humidification with the heat recovery water is far lower than that of make-up air handling unit using the electro-thermal steam humidification. The modified energy efficiency is quite significant. It is hoped that the results of this study can provide a reference for the future when other plant selects the humidification method or changes the existing humidification method.