Design and Development of a vacuum preloaded porous ceramic aerostatic slide

• Main Authors: Kuan-Chih Chen, 陳冠志
• Other Authors: Choung-Lii Chao
• Format: Others
• Language: zh-TW
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/5ccquv

碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 106 === Precision positioning stage is now a necessity in almost all precision machinery. Aerostatic and hydrostatic bearings are widely used to replace rolling element bearing to get rid of the friction induced nonlinearities and wear. In comparison to hydrostatic bearing, aerostatic bearing (gas lubricated bearing) is capable of at running at relatively much higher speeds, capable of operating in very high or very low temperature and gases such as air and nitrogen are non-polluting in the atmosphere. However, orifice-fed type of gas bearings are vulnerable to pneumatic hammer instability. To rectify this drawback, porous type aerostatic bearings with and without vacuum preload were designed and developed in this study. The designed air bearings were simulated by finite element method to investigate the flow field and pressure distribution. The air bearings were subsequently fabricated and mounted on a precision slide. The slide can operate smoothly under a load of 98 N with a vertical stiffness around 7 N/um.