Study of The SnO2:Ni MEMS gas sensor
碩士 === 國立雲林科技大學 === 電子工程系 === 106 === SnO2 material has many excellent characteristics and can detect most gases, but the disadvantage is that it cannot distinguish the type of gas. In this study, SnO2 is used as a sensing material and surface-doped Ni-resistive resistive gas sensor. First, the indo...
Main Authors: | Zheng, Yu-Zhan, 鄭宇展 |
---|---|
Other Authors: | Chen, Shih-Chih |
Format: | Others |
Language: | zh-TW |
Published: |
2018
|
Online Access: | http://ndltd.ncl.edu.tw/handle/t8q6ay |
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