Gas Sensing Behavior of Sputter-Deposited Zinc Oxide Thin Film toward Reducing Gases
碩士 === 國立交通大學 === 材料科學與工程學系所 === 107 === ZnO is an n-type metal oxide semiconductor (MOS). In this study, ZnO gas sensor was prepared by reactive sputtering on the silicon oxide substrate in order to study the sensing behavior of ZnO toward reducing gas at the temperatures below 250℃. The study was...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92x3pe |