A CMOS-MEMS Inductive Pressure Sensor with Low Q Inductor and Oscillator Circuit

碩士 === 國立交通大學 === 電機工程學系 === 107 === Pressure sensors measure the pressure difference between a reference pressure and the pressure we want to sense. There are various kinds of pressure to be measured, such as air pressure, hydraulic pressure etc. Pressure sensors convert the pressure difference to...

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Bibliographic Details
Main Authors: Tsai, Pei-Lun, 蔡佩倫
Other Authors: Yi, Chiu
Format: Others
Language:zh-TW
Published: 2018
Online Access:http://ndltd.ncl.edu.tw/handle/sz23u8