| Summary: | 碩士 === 國立交通大學 === 生醫工程研究所 === 107 === In this thesis, we focused on the system stability when extended gate field effect transistor(EGFET)as the biosensors. First, we fabricate different dielectric materials extended gate with EOT 10 nm, then we analysis the extended gate capacitance by impedance.
During the drift effect measurement, it was found that leakage current causing system unstable when EGFET integration. This phenomenon can be improved by increasing the sensing area. We try to balance the system by integrating a control capacitor into the system. When applying bias to control capacitor, that will generate leakage, and using this leakage to supplement system leakage.
In this study, we discuss how to choose a control capacitor, EGFET system integrated a control capacitor equivalent circuit, voltage division in equivalent circuit and improved the system stability by increasing the sensing area.
The results show that the system stability will be optimize when increasing the sensing area and integrated a control capacitor into EGFET system. We use this platform to measure pH and also modify biotin on the extended gate to detect streptavidin.
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