Stability study on EG-FET biosensors with Different Extended Gate Dielectric Materials
碩士 === 國立交通大學 === 生醫工程研究所 === 107 === In this thesis, we focused on the system stability when extended gate field effect transistor(EGFET)as the biosensors. First, we fabricate different dielectric materials extended gate with EOT 10 nm, then we analysis the extended gate capacitance by impedance. D...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/ka38h3 |