Investigation of coating uniformity in spin-on-dopant process
碩士 === 國立中央大學 === 材料科學與工程研究所 === 107 === In this experiment, we have developed a spin-on dopant (SOD) diffusion technique for fabrication of n-type passivated emitter and rear cell (PERC) solar cells. Compared with traditional diffusion of gases dopant (BBr3 or POCl3), SOD technique could lower the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/rgpp58 |