| Summary: | 碩士 === 國立高雄科技大學 === 電機工程系 === 107 === In this paper, the transmittance and reflectance spectra of three kinds of single-layer optical film materials of magnesium fluoride (MgF2) and cerium oxide (SiO2) pentoxide (Ti3O5) on BK7 glass substrates were simulated by TFCalc software. The numerical values are theoretical values. The above three kinds of thin film materials are plated by a laboratory vacuum evaporation machine, and the spectra are measured by a laboratory spectrometer. The reflection and penetration spectra of the three materials at different film thicknesses, and the phase shift of the observed spectra are recorded. Compare and analyze the theoretical values, and then calibrate the spectrometer and establish a TFCalc refractive index database.
It is known from the above experiments that the plating rate of the single-layer film in the short-wavelength portion is unstable during the evaporation process, and the transmittance is shifted according to the wavelength phase due to the uneven film thickness, and the refractive index of the material is unstable, so the material property is adjusted. Coating machine coating parameters such as substrate temperature and electron beam power, plating rate, oxygenation amount, observation of extreme points by optical monitoring method, etc., using spectrometer measurement equipment to measure the change of reflectance and wavelength, and applying TFCalc software to calculate refraction Rate, through the above group of coating parameters to find a set of coating parameters with the most stable refractive index, in order to establish a refractive index database of the film material in accordance with the working conditions of the evaporator, so that the information of the single layer film (such as refractive index) The uniformity of the film layer, etc.) is stabilized, and the optical coating design result is closer to the result of the optical coating process, and the objective of the optical multilayer film precise process can be achieved.
|
|---|
