Suppression effect and annealing effect on cryogenic mechanical loss of nano-layer coatings deposited by ion beam sputtering

碩士 === 國立清華大學 === 光電工程研究所 === 107

Bibliographic Details
Main Authors:	Chang, Chi-Li, 張啟禮
Other Authors:	Chao, Shiuh
Format:	Others
Language:	zh-TW
Published:	2018
Online Access:	http://ndltd.ncl.edu.tw/handle/d2jh7z

id	ndltd-TW-107NTHU5124004
record_format	oai_dc
spelling	ndltd-TW-107NTHU51240042019-05-16T01:08:03Z http://ndltd.ncl.edu.tw/handle/d2jh7z Suppression effect and annealing effect on cryogenic mechanical loss of nano-layer coatings deposited by ion beam sputtering 利用離子束濺鍍法鍍製奈米多層膜其低溫機械損耗抑制效應與退火效應之研究 Chang, Chi-Li 張啟禮碩士國立清華大學光電工程研究所 107 Chao, Shiuh 趙煦 2018 學位論文 ; thesis 73 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 光電工程研究所 === 107
author2	Chao, Shiuh
author_facet	Chao, Shiuh Chang, Chi-Li 張啟禮
author	Chang, Chi-Li 張啟禮
spellingShingle	Chang, Chi-Li 張啟禮 Suppression effect and annealing effect on cryogenic mechanical loss of nano-layer coatings deposited by ion beam sputtering
author_sort	Chang, Chi-Li
title	Suppression effect and annealing effect on cryogenic mechanical loss of nano-layer coatings deposited by ion beam sputtering
title_short	Suppression effect and annealing effect on cryogenic mechanical loss of nano-layer coatings deposited by ion beam sputtering
title_full	Suppression effect and annealing effect on cryogenic mechanical loss of nano-layer coatings deposited by ion beam sputtering
title_fullStr	Suppression effect and annealing effect on cryogenic mechanical loss of nano-layer coatings deposited by ion beam sputtering
title_full_unstemmed	Suppression effect and annealing effect on cryogenic mechanical loss of nano-layer coatings deposited by ion beam sputtering
title_sort	suppression effect and annealing effect on cryogenic mechanical loss of nano-layer coatings deposited by ion beam sputtering
publishDate	2018
url	http://ndltd.ncl.edu.tw/handle/d2jh7z
work_keys_str_mv	AT changchili suppressioneffectandannealingeffectoncryogenicmechanicallossofnanolayercoatingsdepositedbyionbeamsputtering AT zhāngqǐlǐ suppressioneffectandannealingeffectoncryogenicmechanicallossofnanolayercoatingsdepositedbyionbeamsputtering AT changchili lìyònglízishùjiàndùfǎdùzhìnàimǐduōcéngmóqídīwēnjīxièsǔnhàoyìzhìxiàoyīngyǔtuìhuǒxiàoyīngzhīyánjiū AT zhāngqǐlǐ lìyònglízishùjiàndùfǎdùzhìnàimǐduōcéngmóqídīwēnjīxièsǔnhàoyìzhìxiàoyīngyǔtuìhuǒxiàoyīngzhīyánjiū
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Suppression effect and annealing effect on cryogenic mechanical loss of nano-layer coatings deposited by ion beam sputtering

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