Development of lithium niobate (LiNbO3) piezoelectric thin film

• Main Authors: CHANG, CHI YING, 張啟瑩
• Other Authors: David. T.W. Lin
• Format: Others
• Language: zh-TW
• Published: 2019
• Online Access: http://ndltd.ncl.edu.tw/handle/8h9u5s

碩士 === 國立臺南大學 === 機電系統工程研究所碩士班 === 107 === Technology brings convenience and progress to humans, and sensors are one of the indispensable roles. Through the recent development of Industry 4.0 in various industries, it has been found that different types of sensors are widely used and developed. Therefore, this research aims to develop a flexible and lead-free lithium niobate film pressure sensor. The pressure sensor is prepared by using a Sol-Gel Method to prepare a lithium niobate (LiNbO3) solution, and spin-coating the lithium niobate solution uniformly on the aluminum substrate. It is deposited to form a lithium niobate film. In this study, X-ray diffraction (XRD) and scanning electron microscopy (SEM) were used to observe the crystal phase, material properties and surface morphology of the film. It was confirmed that lithium niobate was deposited on the substrate. At the same time, the piezoelectric effect of the lithium niobate film was tested using a dynamic measurement platform and a drop test. It can be known from the research results that the lithium niobate solution prepared by the process parameters at a concentration of 0.4 mol and the deposition of three layers of lithium niobate film on the substrate at an annealing temperature of 550 ° C have the best response voltage.