Nano-scale displacement measuring Fizeau interferometer using electro-optical phase modulators

• Main Authors: Chin-Yu Hsieh, 謝晉祐
• Other Authors: Liang-Chia Chen
• Format: Others
• Language: zh-TW
• Published: 2019
• Online Access: http://ndltd.ncl.edu.tw/handle/2a6x5c

碩士 === 國立臺灣大學 === 機械工程學研究所 === 107 === In the progress of technology, the demand of high-precision industry for high-precision inspection equipment is getting higher. The demands in industry are mainly from semiconductor manufacturing companies. The equipment with easy machine installation and small volume is needed for precision inspection. Therefore, this research develops a nano-scale fiber-based interferometer. This research will discuss homodyne interferometer’s features and improve the disadvantages by proposed system. For decreasing effect of homodyne interferometry disadvantages, including DC term and orthogonal property between interferogram signals, this research build a displacement measuring Fizeau interferometer with fiber structure. The fiber components, including collimators, circulators are for easy installation and better expandability. The electro-optical modulator of system raise efficiency of phase modulating. Lastly, the interference signal is received with fiber-coupled detectors, and transfer to computer to carry out the signal processing and phase detection. As proved by experiments, the developed measuring system can achieve the goal of decreasing DC term of light and maintain good signal to noise ratio with just one detector. This system can detect a distance with 0.026% error and 0.051% measuring standard deviation. After extrinsic sensing part of system is further miniaturized, the developed system can provide an excellent potential measuring tool for multi-axis machining equipment.