Characterization of hydrogel material and fast microfabrication by two-photon polymerization technology

• Main Authors: Wei-Hsin Chang, 張煒鑫
• Other Authors: Tien-Tung Chung
• Format: Others
• Language: en_US
• Published: 2019
• Online Access: http://ndltd.ncl.edu.tw/handle/2veb89

碩士 === 國立臺灣大學 === 機械工程學研究所 === 107 === This thesis studies the characteristics of hydrogel material polyethylene glycol diacrylate (PEGDA) in microfabrication using two-photon polymerization (TPP) technology. Fast microfabrication of large area TPP products are also studied by using galvanometer scanner with diffractive optical element (DOE). For fabrication of PEGDA products, a 532nm wavelength Nd:YAG picosecond laser and a 100x objective lens with numerical aperture (NA) 1.3 are used. For finding the PEGDA line width in TPP fabrication, two experimental methods, ascending scan method and suspending bridge method, are used. Different aspect ratios of line dimension with different laser power and exposure time can be obtained. It is used in precision fabrication of 3D micro structures. For the fast fabrication using ORMOCOMP® material, a 515nm wavelength femtosecond laser, a xy galvanometer scanner, a z-axis piezo stage, a 50x objective lens with NA 0.8, a 5 x 5 DOE, and a xy planar translation stage are used. A Fresnel zone plate (FZP) lens array with 100 x 100 lens number is rapidly fabricated in 70 minutes. The FZP lens array has area size of 3.32mm x 3.32mm with a resolution of 0.67 µm. From the optical test, it shows good focusing condition and imaging quality.