| Summary: | 碩士 === 國立臺灣大學 === 機械工程學研究所 === 107 === This thesis develops an integrated software system for parametric modeling, structural analysis and optimization of machine structures. First, Excel spreadsheets are designed to store both of the modeling and analyzing parameters of a structure. In model generation, design parameters are obtained from Excel spreadsheets. An AutoCAD LISP program is developed to automatically generate the solid model of the structure and then exported as a SAT file. In structural analysis, material properties and analysis parameters can also be obtained from Excel spreadsheets. A customized ANSYS APDL program is also developed to automatically analyze structural behaviors, such as static and dynamic responses. Analyzing results are then stored back to the Excel spreadsheets. Finally, a C++ program is developed to call AutoCAD LISP program and ANSYS APDL program iteratively for performing optimum design of the structure. Results of design iterations are also stored back to the same spreadsheets. The developed integrated software system is applied to some demo structures, and good results are obtained. This software system is also used in design of a large 3D Abbe-error-free wafer inspection stage structure. The stage has travelling range of 300mm x 300mm x 5mm, and suitable for measurement of 12 inch wafers. Through this system, it can significantly reduce the modeling time and avoid the human error that may be caused by repeated steps compared to conventional methods. In addition, design and analysis result data are stored in Excel spreadsheets, those can be analyzed and processed more easily, improving design convenience and optimization results.
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