Standard Operating Procedures for Chemical Distribution System in Semiconductor Manufacturing Processes

碩士 === 南臺科技大學 === 高階主管企管碩士班 === 107 === At present, the working hours of the chemical liquid supply system practitioners are 24 hours a day, and most of them are dispatched personnel. If the manpower is reduced under the cost considerations, the workload is higher but the welfare remains the same wi...

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Bibliographic Details
Main Authors: HUANG,CHING-HUI, 黃競輝
Other Authors: 賴明材
Format: Others
Language:zh-TW
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/6dahy2
Description
Summary:碩士 === 南臺科技大學 === 高階主管企管碩士班 === 107 === At present, the working hours of the chemical liquid supply system practitioners are 24 hours a day, and most of them are dispatched personnel. If the manpower is reduced under the cost considerations, the workload is higher but the welfare remains the same will make the turnover rate of the employees become higher, resulting in the inability to accumulate and inherit the technical experience, and the vicious circle with higher personnel turnover and higher work harm. Therefore, in order to meet the professional needs of customers for the operation of the system, it is necessary to shorten the training time of the practitioners of the chemical liquid supply system, and to develop a set of standard operating processes, so that the experience inheritance is easy to go online. The high-hazard chemical liquids that must be used in semiconductor manufacturing processes, and the flow of operation of the chemical liquid supply system are the scope of this study. This research will help users to plan a good, safe and standardized process through a professional concept that will provide a high-risk supply of chemicals. After discussing the scope of work of the operation flow of the chemical liquid supply system, the standard operation processes are established for the maintenance and replacement of the facilities and chemical liquids in the system used in the plant. This study has established a safe chemical liquid supply system operation process: how to replace the chemical, how to estimate the management of chemical consumption and safety stock, how to ensure the normal operation and repair of the system, to ensure the future chemical exchange tube operation is stable and safe.