Study on Vacuum Sputtering of Oxide Powders Mixing with Carbon Nanotubes to Improve the Dielectric Coefficient of Materials
碩士 === 東海大學 === 電機工程學系 === 107 === This experiment is mainly carried out in two parts, the first part is Al2O3, BaTiO3 and Ba0.6Sr0.4TiO3 were used to make a powder target respectively for RF magnetron sputtering. Due to a previous study suggests that the mixing of multi-walled carbon nanotubes (M...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2019
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Online Access: | http://ndltd.ncl.edu.tw/handle/q36mav |