Study on Vacuum Sputtering of Oxide Powders Mixing with Carbon Nanotubes to Improve the Dielectric Coefficient of Materials

碩士 === 東海大學 === 電機工程學系 === 107 ===   This experiment is mainly carried out in two parts, the first part is Al2O3, BaTiO3 and Ba0.6Sr0.4TiO3 were used to make a powder target respectively for RF magnetron sputtering. Due to a previous study suggests that the mixing of multi-walled carbon nanotubes (M...

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Bibliographic Details
Main Authors: CHEN-WEI, CHANG, 張宸瑋
Other Authors: JIH-HSIN, LIU
Format: Others
Language:zh-TW
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/q36mav