Atomic-scale analysis of plastic deformation in thin-film forms of electronic materials
Nanometer-scale-thick films of metals and semiconductor heterostructures are used increasingly in modern technologies, from microelectronics to various areas of nanofabrication. Processing of such ultrathin-film materials generates structural defects, including voids and cracks, and may induce struc...
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| Language: | ENG |
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ScholarWorks@UMass Amherst
2009
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| Online Access: | https://scholarworks.umass.edu/dissertations/AAI3359146 |
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