Novel RF MEMS Devices Enabled by Three-Dimensional Micromachining
This thesis presents novel radio frequency microelectromechanical (RF MEMS) circuits based on the three-dimensional (3-D) micromachined coplanar transmission lines whose geometry is re-configured by integrated microelectromechanical actuators. Two types of novel RF MEMS devices are proposed. The fir...
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| Format: | Doctoral Thesis |
| Language: | English |
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KTH, Mikro- och nanosystemteknik
2014
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-143757 http://nbn-resolving.de/urn:isbn:978-91-7595-075-4 |