Large area zone plate exposure by fixed beam moving stage lithography
In this diploma project the so-called fixed beam moving stage (FBMS) module in the Raith 150 electron beam lithography system has been evaluated for making large area zone plate exposures. The project goal, besides the evaluation of the module, has been to find an exposure recipe for exposing zone p...
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| Format: | Others |
| Language: | English |
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KTH, Biomedicinsk fysik och röntgenfysik
2011
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-44548 |