Dual work function metal gates by full silicidation of poly-Si with Ni or Ni-Co bi-layers

Dual work function metal gates by full silicidation of poly-Si with Ni or Ni-Co bi-layers

Not available === text

Bibliographic Details
Main Author: Liu, Jun
Format: Others
Language:English
Published: 2008
Subjects:
Silicon oxide
Gate array circuits
Online Access:http://hdl.handle.net/2152/2817
id ndltd-UTEXAS-oai-repositories.lib.utexas.edu-2152-2817
record_format oai_dc
spelling ndltd-UTEXAS-oai-repositories.lib.utexas.edu-2152-28172015-09-20T16:51:15ZDual work function metal gates by full silicidation of poly-Si with Ni or Ni-Co bi-layersLiu, JunSilicon oxideGate array circuitsNot availabletext2008-08-28T23:10:26Z2008-08-28T23:10:26Z20062008-08-28T23:10:26ZThesiselectronicb66061076http://hdl.handle.net/2152/2817163920039engCopyright is held by the author. Presentation of this material on the Libraries' web site by University Libraries, The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works.
collection NDLTD
language English
format Others
sources NDLTD
topic Silicon oxide
Gate array circuits
spellingShingle Silicon oxide
Gate array circuits
Liu, Jun
Dual work function metal gates by full silicidation of poly-Si with Ni or Ni-Co bi-layers
description Not available === text
author Liu, Jun
author_facet Liu, Jun
author_sort Liu, Jun
title Dual work function metal gates by full silicidation of poly-Si with Ni or Ni-Co bi-layers
title_short Dual work function metal gates by full silicidation of poly-Si with Ni or Ni-Co bi-layers
title_full Dual work function metal gates by full silicidation of poly-Si with Ni or Ni-Co bi-layers
title_fullStr Dual work function metal gates by full silicidation of poly-Si with Ni or Ni-Co bi-layers
title_full_unstemmed Dual work function metal gates by full silicidation of poly-Si with Ni or Ni-Co bi-layers
title_sort dual work function metal gates by full silicidation of poly-si with ni or ni-co bi-layers
publishDate 2008
url http://hdl.handle.net/2152/2817
work_keys_str_mv AT liujun dualworkfunctionmetalgatesbyfullsilicidationofpolysiwithniornicobilayers
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