Catalyst diffusion in positive-tone chemically amplified photoresists

Not available === text

Bibliographic Details
Main Author:	Stewart, Michael Dean
Format:	Others
Language:	English
Published:	2008
Subjects:	Photoresists Microlithography
Online Access:	http://hdl.handle.net/2152/965

id	ndltd-UTEXAS-oai-repositories.lib.utexas.edu-2152-965
record_format	oai_dc
spelling	ndltd-UTEXAS-oai-repositories.lib.utexas.edu-2152-9652015-09-20T16:49:22ZCatalyst diffusion in positive-tone chemically amplified photoresistsStewart, Michael DeanPhotoresistsMicrolithographyNot availabletext2008-08-28T21:41:16Z2008-08-28T21:41:16Z20032008-08-28T21:41:16ZThesiselectronicb57231217http://hdl.handle.net/2152/965569751513122798engCopyright is held by the author. Presentation of this material on the Libraries' web site by University Libraries, The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works.
collection	NDLTD
language	English
format	Others
sources	NDLTD
topic	Photoresists Microlithography
spellingShingle	Photoresists Microlithography Stewart, Michael Dean Catalyst diffusion in positive-tone chemically amplified photoresists
description	Not available === text
author	Stewart, Michael Dean
author_facet	Stewart, Michael Dean
author_sort	Stewart, Michael Dean
title	Catalyst diffusion in positive-tone chemically amplified photoresists
title_short	Catalyst diffusion in positive-tone chemically amplified photoresists
title_full	Catalyst diffusion in positive-tone chemically amplified photoresists
title_fullStr	Catalyst diffusion in positive-tone chemically amplified photoresists
title_full_unstemmed	Catalyst diffusion in positive-tone chemically amplified photoresists
title_sort	catalyst diffusion in positive-tone chemically amplified photoresists
publishDate	2008
url	http://hdl.handle.net/2152/965
work_keys_str_mv	AT stewartmichaeldean catalystdiffusioninpositivetonechemicallyamplifiedphotoresists
_version_	1716819786167484416

Catalyst diffusion in positive-tone chemically amplified photoresists

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