Effect of Surface Stress on Micromechanical Cantilevers for Sensing Applications
Three models for surface stress loading effect on a micromechanical cantilever are proposed as concentrated moment acting at the free end (Model I), concentrated moment plus axial force acting at the free end (Model II), and uniformly distributed surface force acting along the microcantilever (Model...
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| Format: | Others |
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Virginia Tech
2014
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| Online Access: | http://hdl.handle.net/10919/34043 http://scholar.lib.vt.edu/theses/available/etd-07172008-111320/ |