Degradation in lead zirconate titanate thin film capacitors for non-volatile memory applications
A study of the degradation of ferroelectric properties in Lead Zirconate Titanate (PZT) thin film capacitors is presented in this work. Metal- Ferroelectric - Metal capacitors were prepared by sputtering and metal organic decomposition (MOD) techniques. Samples with several different film thicknesse...
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| Format: | Others |
| Language: | en |
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Virginia Tech
2014
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| Online Access: | http://hdl.handle.net/10919/44583 http://scholar.lib.vt.edu/theses/available/etd-09052009-040636/ |