TRENCH ETCHING IN SILICON WITH A CONTROLLABLE SIDEWALL ANGLE (TEMPERATURE)

TRENCH ETCHING IN SILICON WITH A CONTROLLABLE SIDEWALL ANGLE (TEMPERATURE)

Bibliographic Details
Main Author: Smadi, Mithkal Moh'd, 1960-
Language:en_US
Published: The University of Arizona. 1986
Subjects:
Integrated circuits > Design and construction.
Online Access:http://hdl.handle.net/10150/276593
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spelling ndltd-arizona.edu-oai-arizona.openrepository.com-10150-2765932015-10-23T05:01:56Z TRENCH ETCHING IN SILICON WITH A CONTROLLABLE SIDEWALL ANGLE (TEMPERATURE) Smadi, Mithkal Moh'd, 1960- Integrated circuits -- Design and construction. 1986 text Thesis-Reproduction (electronic) http://hdl.handle.net/10150/276593 15581682 1328680 .b1594640x en_US Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author. The University of Arizona.
collection NDLTD
language en_US
sources NDLTD
topic Integrated circuits -- Design and construction.
spellingShingle Integrated circuits -- Design and construction.
Smadi, Mithkal Moh'd, 1960-
TRENCH ETCHING IN SILICON WITH A CONTROLLABLE SIDEWALL ANGLE (TEMPERATURE)
author Smadi, Mithkal Moh'd, 1960-
author_facet Smadi, Mithkal Moh'd, 1960-
author_sort Smadi, Mithkal Moh'd, 1960-
title TRENCH ETCHING IN SILICON WITH A CONTROLLABLE SIDEWALL ANGLE (TEMPERATURE)
title_short TRENCH ETCHING IN SILICON WITH A CONTROLLABLE SIDEWALL ANGLE (TEMPERATURE)
title_full TRENCH ETCHING IN SILICON WITH A CONTROLLABLE SIDEWALL ANGLE (TEMPERATURE)
title_fullStr TRENCH ETCHING IN SILICON WITH A CONTROLLABLE SIDEWALL ANGLE (TEMPERATURE)
title_full_unstemmed TRENCH ETCHING IN SILICON WITH A CONTROLLABLE SIDEWALL ANGLE (TEMPERATURE)
title_sort trench etching in silicon with a controllable sidewall angle (temperature)
publisher The University of Arizona.
publishDate 1986
url http://hdl.handle.net/10150/276593
work_keys_str_mv AT smadimithkalmohd1960 trenchetchinginsiliconwithacontrollablesidewallangletemperature
_version_ 1718102321644175360

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