The use of electron beam lithography and chemical etching for the fabrication of micromechanical structures

Bibliographic Details
Main Author:	Lutwyche, Mark Ian
Published:	University of Cambridge 1991
Subjects:	670 Industrial processes & manufacturing processes
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.239063

id	ndltd-bl.uk-oai-ethos.bl.uk-239063
record_format	oai_dc
spelling	ndltd-bl.uk-oai-ethos.bl.uk-2390632015-03-19T09:20:42ZThe use of electron beam lithography and chemical etching for the fabrication of micromechanical structuresLutwyche, Mark Ian1991670Industrial processes & manufacturing processesUniversity of Cambridgehttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.239063Electronic Thesis or Dissertation
collection	NDLTD
sources	NDLTD
topic	670 Industrial processes & manufacturing processes
spellingShingle	670 Industrial processes & manufacturing processes Lutwyche, Mark Ian The use of electron beam lithography and chemical etching for the fabrication of micromechanical structures
author	Lutwyche, Mark Ian
author_facet	Lutwyche, Mark Ian
author_sort	Lutwyche, Mark Ian
title	The use of electron beam lithography and chemical etching for the fabrication of micromechanical structures
title_short	The use of electron beam lithography and chemical etching for the fabrication of micromechanical structures
title_full	The use of electron beam lithography and chemical etching for the fabrication of micromechanical structures
title_fullStr	The use of electron beam lithography and chemical etching for the fabrication of micromechanical structures
title_full_unstemmed	The use of electron beam lithography and chemical etching for the fabrication of micromechanical structures
title_sort	use of electron beam lithography and chemical etching for the fabrication of micromechanical structures
publisher	University of Cambridge
publishDate	1991
url	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.239063
work_keys_str_mv	AT lutwychemarkian theuseofelectronbeamlithographyandchemicaletchingforthefabricationofmicromechanicalstructures AT lutwychemarkian useofelectronbeamlithographyandchemicaletchingforthefabricationofmicromechanicalstructures
_version_	1716769009925357568

The use of electron beam lithography and chemical etching for the fabrication of micromechanical structures

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