The use of electron beam lithography and chemical etching for the fabrication of micromechanical structures

The use of electron beam lithography and chemical etching for the fabrication of micromechanical structures

Bibliographic Details
Main Author:	Lutwyche, Mark Ian
Published:	University of Cambridge 1991
Subjects:	670 Industrial processes & manufacturing processes
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.239063

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